JPH0477323B2 - - Google Patents

Info

Publication number
JPH0477323B2
JPH0477323B2 JP59112085A JP11208584A JPH0477323B2 JP H0477323 B2 JPH0477323 B2 JP H0477323B2 JP 59112085 A JP59112085 A JP 59112085A JP 11208584 A JP11208584 A JP 11208584A JP H0477323 B2 JPH0477323 B2 JP H0477323B2
Authority
JP
Japan
Prior art keywords
drive
shaft
displacement
piezoelectric
voltage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59112085A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60256814A (ja
Inventor
Kazuma Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rion Co Ltd
Original Assignee
Rion Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rion Co Ltd filed Critical Rion Co Ltd
Priority to JP59112085A priority Critical patent/JPS60256814A/ja
Publication of JPS60256814A publication Critical patent/JPS60256814A/ja
Publication of JPH0477323B2 publication Critical patent/JPH0477323B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/021—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors using intermittent driving, e.g. step motors, piezoleg motors

Landscapes

  • Details Of Measuring And Other Instruments (AREA)
  • Control Of Position Or Direction (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
JP59112085A 1984-05-31 1984-05-31 微小変位駆動装置 Granted JPS60256814A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59112085A JPS60256814A (ja) 1984-05-31 1984-05-31 微小変位駆動装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59112085A JPS60256814A (ja) 1984-05-31 1984-05-31 微小変位駆動装置

Publications (2)

Publication Number Publication Date
JPS60256814A JPS60256814A (ja) 1985-12-18
JPH0477323B2 true JPH0477323B2 (en]) 1992-12-08

Family

ID=14577710

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59112085A Granted JPS60256814A (ja) 1984-05-31 1984-05-31 微小変位駆動装置

Country Status (1)

Country Link
JP (1) JPS60256814A (en])

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2510486B2 (ja) * 1984-06-29 1996-06-26 キヤノン株式会社 圧電装置
JPS62216677A (ja) * 1986-03-18 1987-09-24 神鋼電機株式会社 楕円振動機
JPS63294271A (ja) * 1987-05-22 1988-11-30 Nec Corp 超音波モ−タ

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5814379A (ja) * 1981-07-20 1983-01-27 Toshiba Corp 偏向ア−ム装置
JPS5958811U (ja) * 1982-10-04 1984-04-17 ソニー株式会社 微小移動位置決め装置

Also Published As

Publication number Publication date
JPS60256814A (ja) 1985-12-18

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